In order to overcome industrial limitations of quality, cost, and competitiveness, new ideas based on various technologies should be emerged. Through the definition of issue and root cause, FMEA, and data based decision, a successful development of unique ways have been achieved such as DCS for low dislocation density and easy strain control and SD-ALD for high quality and conformal dielectric and metal layer as described at 'Experiences' section, based on my extensive knowledge about various thin film processes, Vacuum equipments, semiconductor devices, and various electronic materials on Semiconductor, LED, and MEMS.
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